Semicon Portal | Atonarp launches In-Situ monitorable mass spectrometer [JP]

Tokyo and Silicon Valley-based start-up Atonarp, released a small mass spectrometer for In-Situ monitoring of semiconductor manufacturing equipment. Semi-guiding analysis of process gas during etching and deposition in the chamber of manufacturing equipment as well as it can provide insights feedback in real time. In short, it can be the one for the basic technology of smart manufacturing.

Smart manufacturing or digital transformation (DX) in manufacturing sites is required. It is required for increasing the production efficiency. DX in Semiconductor manufacturing can be a powerful means of reducing costs by high yield and production efficiency. One of them is the optimization of manufacturing conditions by grasping the current situation of the manufacturing equipment (diagnosis of the equipment).